Generally used for established processes.
Ideal for pre-cleaning, activating and etching.
The economical IndustrialLine systems are designed for continuous operation (24/7) for series with large quantities.
A small Siemens controller provides process control and storage ensuring repeatable process and quality.
The operator display provides visualization of the process, recipe data and logs for quality assurance and documentation.
Chamber volumes are from 150 to 890 l and are accessed by a swing door for easy loading.
chamber volume 150 l
chamber volume 390 l
chamber volume 890 l
To support the most efficient use we can supply various loading systems.
The example shown for the PlasmaActivate 890 for example has a tray system in the chamber to maximize usage of the chamber capacity.
If you need to perform more than one process step without venting please see our Profi line or custom systems.
