Multi-functional plasma systems
The ProfiLine production plasma systems are highly versatile.
The ability to switch gas type during the process enables multiple process steps to be carried out without venting.
You can clean, etch and prime to get maximum adhesion, all in one step, without venting the chamber.
Plasma cleaning to produce ultra-pure surfaces needed for modern EUV lithography where contamination is measured in Atomic percent.
Additional equipment is available to make the use more efficient, such as the loading system shown below for the PlasmaActivate 350, the racks can be remotely loaded and then slid into the chamber.
Oxygen Concentrators are also available to reduce the need for gas storage.
Rotating drums for processing small goods and powders.