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FAQ about low pressure plasma systems and treatment, cleaning, etching and coating.

Questions and answers about plasma treatment systems and processes.

Plasma treating of metal. View in the chamber
System Components How Plasma Works Process Advantages Treatable Materials Capacity Which Gases Power supply requirements Etching vs. Activation Safety & Environment Plasma cleaning information page Plasma cleaners information page

What components are in a plasma surface treatment system?

To generate low-pressure plasma for industrial surface modification, the following equipment is essential:

  • Vacuum Chamber: Durable housing for the plasma process.
  • Vacuum Pump: Maintains the required low-pressure environment.
  • Gas Supply: Controlled delivery of process gases (O₂, Ar, etc.).
  • MF/HF Generator: Provides the energy source for gas ionization.
Low pressure plasma chamber schematic

How does a plasma system work?

The process follows a precise cycle to ensure maximum surface uniformity:

1

Chamber is evacuated to 0.1–1.0 mbar.

2

Process gas is introduced and ionized via electrodes.

3

Plasma reacts with the substrate (1–30 min cycle).

4

Chamber vents to atmospheric pressure for part removal.

What are the advantages of a low pressure plasma treater?

Advantages of low-pressure plasma systems

  • Cost-effective and durable
  • Minimal material consumption
  • High process reliability
  • Capable of treating complex shapes and delicate substrates
  • Efficient and environmentally friendly
  • Extremely versatile

Which materials can be plasma treated?

  • Metal
  • Plastics /Polymers
  • Elastomers
  • Polymers combined with other materials, metals for example
  • Textiles

Parts with complex geometries can be treated or cleaned as the plasma penetrates even the smallest gaps.

Textiles and roll goods can be treated in special roll to roll plasma chambers.

We offer this as a service at our factory in Herrenberg.

Vacuum chamber capacity size and quantity?

  • The size of the parts and the quantity determine the vacuum chamber size.
  • The maximal throughput for parts is dependent on the plasma process.
  • For example, surface activation usually only takes about 5 min whereas cleaning and etching may take up to 30 minutes.
  • Dependent on the components to be treated it may be possible to bulk treat large quantities in a rotating drum system.
  • Flat parts can be treated on multiple racks at various levels in the vacuum chamber. Textiles and foils can be treated on a roll to roll system.
  • It is also no problem to design a chamber for large complex parts.

Which gases are used?

  • Oxygen
  • Hydrogen
  • Argon
  • Nitrogen
  • Fluor gas

Dependent on the desired treatment either a mixture, or even other gases may be used. We will advise you on the best option.

Power supply requirements?

For the larger production systems, you will need a 400V supply.

For the small table top Laboratory / small production systems you will need a 230-volt socket.

What is the difference between Plasma Etching and Activation?

Plasma Etching: Accurately roughens the surface, increasing the total surface area for adhesives or paint to "anchor" to. Generally removes 10 to 100 µm of material.

Plasma Activation: A faster process (under 5 min) that creates functional groups on the surface, allowing even difficult materials to bond optimally with paints and glues.

Is plasma treatment of selected areas possible?

The areas on the surface that should not be treated can be masked, so that only selected areas of the work piece are treated.

Plasma-spot ® offers an alternative.

This employs a specially designed delivery system that focuses the plasma on to the specific areas to be treated.

An advantage of the Plasma-spot ® process method is the extremely short cycle time due to the short time needed to evacuate the chamber.

Are there environmental and health impacts?

The low-pressure process is extremely environmentally friendly.

Due to the very small amounts of process gas used there is no danger of creating a poisonous or explosive environment.

Where fluorinated gases are used a special filter, technique is used to eliminate any last risk due to the exhaust gases.

No heath damaging radiated energy is given off from the process.

Plasma is a naturally occurring state of matter, the “Northern lights” being a popular visible example.