ProfiLine Programmable plasma systems
Production Plasma systems designed for 24/7 production.
Ideal for all plasma processing, cleaning, etching, adhesion promotion, anti-fogging, low-friction and other surface modification tasks.
Process visualization, storing recipes and protocols for quality control are enabled by the built in industrial PC.
Loading and emptying of the chamber is via a space saving sliding door.
Multi-functional plasma systems
The ProfiLine production plasma systems are highly versatile.
The ability to switch gas type during the process enables multiple process steps to be carried out without venting.
You can clean, etch and prime to get maximum adhesion, all in one step, without venting the chamber.
Plasma cleaning to produce ultra-pure surfaces needed for modern EUV lithography where contamination is measured in Atomic percent.
Additional equipment is available to make the use more efficient, such as the loading system shown below for the PlasmaActivate 350, the racks can be remotely loaded and then slid into the chamber.
Oxygen Concentrators are also available to reduce the need for gas storage.
Rotating drums for processing small goods and powders.
PlasmaActivate 150
Standard production system.
- Chamber volume: 150 l
- Outside : BxHxD: 963 x 2130 x 1140 mm
- Chamber Size: BxHxD: 500 x 500 x 600 mm
The usable chamber volume may be reduced according to the electrode construction and any product mounting system.
- Controls:SPS Controls (Vipa, Siemens).
Variable parameters: Time, pressure, power, process gas.
- Generator: 5000W
PlasmaActivate 390
Standard production system.
- Chamber volume: 390 l
- Outside : BxHxD: BxHxD: 1190 x 2650 x 1250 mm
- Chamber Size: BxHxD: BxHxD: 730 x 720 x 730 mm
The usable chamber volume may be reduced according to the electrode construction and any product mounting system.
- Controls:SPS Controls (Vipa, Siemens).
Variable parameters: Time, pressure, power, process gas.
- Generator: 5000W
